发明名称 |
SYSTEM AND METHOD FOR DETECTING LOCAL MECHANICAL STRESS IN INTEGRATED DEVICES |
摘要 |
A method of detecting local mechanical stress in integrated devices is provided, the method comprising: enabling the detection of a photovoltage difference between a scan probe device and a surface portion of an integrated device, the scan probe device being configured to deflect in response to the photovoltage difference; measuring the deflection of the scan probe device in response to the photovoltage difference between the scan probe device and the surface portion of the integrated device; and calculating a local stress level within the integrated device by determining a local work function of the surface portion of the integrated device based upon the deflection of the scan probe device.
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申请公布号 |
US2009219508(A1) |
申请公布日期 |
2009.09.03 |
申请号 |
US20080039830 |
申请日期 |
2008.02.29 |
申请人 |
BUMM LLOYD;DAHAYANAKA DAMINDA;KASZUBA PHILIP V;MOSZKOWICZ LEON;SLINKMAN JAMES A |
发明人 |
BUMM LLOYD;DAHAYANAKA DAMINDA;KASZUBA PHILIP V.;MOSZKOWICZ LEON;SLINKMAN JAMES A. |
分类号 |
G01B11/16 |
主分类号 |
G01B11/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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