| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin film of a one-dimensional nano-material having favorable orientation, transparency and conductivity, and a manufacturing method of an electronic device. <P>SOLUTION: A CNT dispersion liquid composed of a surfactant aqueous solution is prepared; its liquid droplet is attached to one end of a nozzle 12, and inflated by making air 16 flow into the other end of the nozzle, to form an air bubble 10 composed of a film containing CNT 22; part of the air bubble is made into contact with the surface of a substrate 14, and the air bubble is inflated by making air flow into the other end of the nozzle, to increase the contact area between the substrate and the air bubble film; after the air bubble is burst, a film on the substrate is washed with water, and dried to form a CNT thin film 20. The CNT is nearly parallelly radially orientated on the substrate surface, and the thin film is cut out together with the substrate with a shape holding one orientation direction. The CNT thin film is used for transparent electrodes in liquid crystal devices, electroluminescence devices, electrochromic devices, field effect transistors, touch panels, solar batteries and the like. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
