| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser electrode which can obtain a stable laser output by inhibiting the deterioration of the electrode. SOLUTION: A desired single metal which is an element capable of forming a strong fluoride film, e.g. calcium (Ca), is doped to an anode 3 of an electrode 1 for a gas laser attached to a laser chamber. Only the surface of a discharge part 3a of the anode 3 is heated, and when the fluorination progresses further than parts (in which no discharge is performed) other than the discharge part 3a, the fluoride film is thickly formed on the surface of the discharge part 3a of the anode 3, especially. COPYRIGHT: (C)2009,JPO&INPIT |
