| 摘要 |
PROBLEM TO BE SOLVED: To provide a test method and a test apparatus for testing integrated-circuit technology and, to be more precise, provide a probe card constituted in such a way as to reduce crosstalk between probes of a probe card. SOLUTION: The probe card includes a Printed Circuit Board (PCB) and a probe ring coupled to PCB. The probe card further includes a plurality of probes coupled to PCB and the probe card and a plurality of tubes each related to the plurality of probes. Each tube is constituted in such a way as to envelope at least part of the probes to which the tube is related. Each tube includes an inside dielectric part and an outside electrically conductive part. The conductive part of each tube is electrically coupled to PCB. COPYRIGHT: (C)2009,JPO&INPIT
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