发明名称 DRY ICE SNOW CLEANING APPARATUS AND METHOD
摘要 PROBLEM TO BE SOLVED: To provide a dry ice snow cleaning apparatus capable of controlling of pulse spraying of dry ice snow and reducing the amount of carbon dioxide consumed. SOLUTION: The apparatus cleans target articles by spraying dry ice snow formed by adiabatic expansion of pressurized liquefied carbon dioxide onto the articles from the spray nozzle 1 and has a carbon dioxide supply valve 8 switching the supply of pressurized liquefied carbon dioxide, an orifice 3 expanding adiabatically the liquefied carbon dioxide supplied from the carbon dioxide supply valve 8 and a conduit tube 2 extending from the orifice 3 to the spray nozzle 1. The internal volume of the passage from the seat of the carbon dioxide gas supply valve 8 to the orifice 3 is set to be 0.58 cm<SP>3</SP>or less. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009195762(A) 申请公布日期 2009.09.03
申请号 JP20080036751 申请日期 2008.02.19
申请人 AIR WATER INC 发明人 INAGAKI TORU;UKAWA TADASHI
分类号 B08B7/00;H01L21/304 主分类号 B08B7/00
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