发明名称 METHOD OF PRODUCING ELECTRONIC COMPONENT
摘要 A method of producing an electronic component includes forming a film of a first metal above a substrate; converting partly the film of the first metal into a film containing a second metal by replacement of at least part of the first metal with the second metal; forming a film of a third metal above the film containing the second metal; and removing the film of the first metal other than the film containing the second metal by wet etching using the film of the third metal as a mask.
申请公布号 US2009218230(A1) 申请公布日期 2009.09.03
申请号 US20090369794 申请日期 2009.02.12
申请人 IIJIMA TADASHI 发明人 IIJIMA TADASHI
分类号 H01B13/00;C23C28/02;C25D5/00 主分类号 H01B13/00
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