摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device which increases output power from a device by compensating the coupling loss of an optical fiber and an optical modulator and a loss in a semiconductor InP Mach-Zehnder modulator, when a multi-chip module for a laser and the optical modulator are manufactured. SOLUTION: A semiconductor optical amplifier 50 and a Mach-Zehnder modulator 60 are integrated in the direction of guiding lightλ1 on one and the same semiconductor substrate 1. COPYRIGHT: (C)2009,JPO&INPIT
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