| 摘要 |
A coating system is applied to a ceramic evaporator boat to extend the life of the boat. The coating system includes a ceramic layer is applied over the surface of an evaporator boat reservoir. Optionally, a refractory metal layer is applied as an intermediate layer between the surface of the evaporator boat reservoir and the ceramic layer. The ceramic layer is form of a ceramic material selected from metal borides, metal nitrides, metal carbides, metal oxides, and combinations thereof, and wherein the metal component of the ceramic material is selected from zirconium, aluminum, titanium, silicon, tantalum, vanadium, and combinations thereof. The resulting coating system reduces corrosion and/or erosion that occur primarily in the reservoir region of the evaporator boat. One method of applying or depositing the ceramic layer or the optional refractory metal layer includes sputtering.
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