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发明名称
摘要
申请公布号	JP2009531548(A)	申请公布日期	2009.09.03
申请号	JP20090502828	申请日期	2007.03.14
申请人		发明人
分类号	C23C16/455;C23C16/40;H01L21/205;H01L21/31;H01L21/365	主分类号	C23C16/455
代理机构		代理人
主权项
地址

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