| 摘要 |
PROBLEM TO BE SOLVED: To improve maintenability inside a vacuum processing chamber of a vacuum processing apparatus. SOLUTION: The vacuum processing apparatus 1 includes a first process chamber 101 in which a workpiece 107 is housed for vacuum treatment, a second process chamber 102 which can be evacuated and where a workpiece before vacuum treatment and a workpiece after vacuum treatment are housed, a gate part 103 interposed between the first process chamber and the second process chamber, being detachable from the first process chamber, a transportation device 202 with which the workpiece before vacuum treatment is transported into a vacuum processing part 104 from a carry-in part 108 through the gate part 103, and a workpiece after vacuum treatment is transported from the vacuum processing part 104 to a carry-out part 119, and a moving mechanism 200 for separating the first process chamber away from the second process chamber. COPYRIGHT: (C)2009,JPO&INPIT
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