| 摘要 |
PROBLEM TO BE SOLVED: To prepare a desired extremely-thin sample by suppressing bending of the sample in a tendency of thinning of the sample, without losing an observation domain. SOLUTION: This method has processes for: irradiating an ion beam from one surface side of a thin film-shaped sample 1, and milling one surface of the sample until an observation surface 12a is exposed; forming a reinforcement layer 2 for reinforcing the sample on milled one surface of the sample; and irradiating the ion beam from the other surface side of the sample 1, and milling the other surface of the sample until the observation surface is exposed. COPYRIGHT: (C)2009,JPO&INPIT
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