| 摘要 |
PROBLEM TO BE SOLVED: To provide a precise photoelectric encoder capable of acquiring a plurality of types of information from one track. SOLUTION: The photoelectric encoder includes: a scale 12; a light source 11 for applying measurement light to the scale 12; a light receiver 14 for receiving the measurement light reflected by or transmitted through the scale 12; and a signal processing circuit 20 for detecting the absolute position of the scale 12 by processing the signal received by the light receiver 14. The scale 12 includes a modulation incremental track 301 having a first modulation incremental pattern 31 where a plurality of first modulation scale patterns 3A(k) are arranged. The first modulation incremental pattern 31 is formed so that the shape of the first modulation scale pattern 3A(k) changes periodically within a prescribed period Pr in a measurement length direction. COPYRIGHT: (C)2009,JPO&INPIT
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