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发明名称
Verfahren zur Ionenstrahlbearbeitung mit Wasserdampf
摘要
申请公布号
DE69637975(D1)
申请公布日期
2009.09.03
申请号
DE19966037975
申请日期
1996.04.08
申请人
NORTH CAROLINA STATE UNIVERSITY
发明人
RUSSELL, PHILLIP E.;GRIFFIS, DIETER P.;SHEDD, GORDON M.;STARK, TERRENCE J.;VITARELLI, JAMES
分类号
C23F4/00;H01L21/306;H01J37/305;H01J37/32;H01L21/04;H01L21/302;H01L21/3065;H01L21/311;H01L21/3213
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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