| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspecting method and an inspecting device for a suction nozzle unit that can inspect a slide portion of the suction nozzle unit inexpensively without requiring dedicated facilities. <P>SOLUTION: After a nozzle shaft 12 is positioned at a reference height position where a suction hole of a suction nozzle 14 abuts against an inspection surface 37 from above, the nozzle shaft 12 is lowered by a certain quantity from the reference height position and then while pressure is applied into the suction nozzle 14, the nozzle shaft 12 is elevated from the lowering position to measure an air flow rate in the suction nozzle 14, thereby judging whether a state of a slide between the nozzle shaft 12 and a nozzle holder 13 (the slide portion of the suction nozzle unit) is satisfactory on the basis of whether the air flow rate in the suction nozzle 14 exceeds a predetermined threshold until the nozzle shaft 12 reaches the reference height position. <P>COPYRIGHT: (C)2009,JPO&INPIT |
