发明名称 SPINDLE UNIT
摘要 <p><P>PROBLEM TO BE SOLVED: To prevent deterioration of a cord and a tube connected to a spindle unit due to a high temperature of an ejected and already used air, in a spindle unit, with a rotary shaft supported by an air bearing. <P>SOLUTION: In a spindle unit 2, in which after a cutting blade is fitted to a tip end portion of a rotary shaft 20, a rotary drive part 22 is connected to an end portion, and the rotary shaft 20 is rotatably supported by a thrust bearing 212 and a radial bearing 214 by ejected air, deterioration of a cord 22c and a tube 216a is prevented by inhibiting the air from reaching a high temperature by exhausting the ejected and recovered air from an exhaust port 219 opened on a rear side of the rotation drive part 22. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009196029(A) 申请公布日期 2009.09.03
申请号 JP20080039895 申请日期 2008.02.21
申请人 DISCO ABRASIVE SYST LTD 发明人 WAKITA NOBUHIKO
分类号 B24B41/04;B24B27/06;F16C32/06;H01L21/301 主分类号 B24B41/04
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