| 摘要 |
PROBLEM TO BE SOLVED: To provide a joint structure of a multi-joint robot arm capable of improving durability of a cable and reducing dust, and a mini-environment device. SOLUTION: The first, second and third joint axes 21a, 21b and 21c forming the joint structure of a multi-joint robot arm 20b are hollow. A cylindrical protection member 213 made of a resin is pressed into each of hollow parts 21a1, 21b1 and 21c1, and the inner circumference surfaces of the hollow parts 21a1, 21b1 and 21c1 are coated with the protection member 213 to form wire insertion holes used as paths for a cable 23. A transfer robot 20 provided with the joint structure of the multi-joint robot arm 20b is installed on the mini-environment device. COPYRIGHT: (C)2009,JPO&INPIT
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