发明名称 Semiconductor Device and Method of Manufacturing Semiconductor Device
摘要 A method of manufacturing a semiconductor device that includes a first and second device regions on a substrate. The method includes the steps of forming an insulation layer on the substrate, laminating a first semiconductor layer having a plane orientation different from the surface of the substrate on the insulation layer and exposing the substrate by removing the insulation layer and the first semiconductor layer from the second device region. A second semiconductor layer having the same plane orientation as the substrate and that is made of a strained layer is formed by epitaxial growth on the exposed substrate in the second device region.
申请公布号 US2009221134(A1) 申请公布日期 2009.09.03
申请号 US20090425476 申请日期 2009.04.17
申请人 SONY CORPORATION 发明人 WANG JUNLI;KATAOKA TOYOTAKA;SAITO MASAKI
分类号 H01L21/20 主分类号 H01L21/20
代理机构 代理人
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