发明名称 ROLLER TYPE NANO-IMPRINT DEVICE, MOLD ROLL FOR THE ROLLER TYPE NANO-IMPRINT DEVICE, FIXED ROLL FOR THE ROLLER TYPE NANO-IMPRINT DEVICE, AND NANO-IMPRINT SHEET MANUFACTURING METHOD
摘要 Disclosed is a roller type nano-imprint device in which a transferred film, to which a nano-structure has been transferred by a mold roll, can be prevented from becoming uneven in thickness, and the mold roll can be easily exchanged. The roller type nano-imprint device forms protrusions of a nanometer size continuously on the surface of the transferred film by rotating the mold roll. This mold roll is a cylinder having recesses of a nanometer size formed in the outer circumference thereof. The nano-imprint device includes a fluid container having such an elastic film in the region enclosed by the inner circumference of the mold roll as can be inflated by injecting a fluid, so that the mold roll is mounted and demounted, while the elastic film being shrunken, and is held from the inside while the elastic film being inflated.
申请公布号 WO2009107294(A1) 申请公布日期 2009.09.03
申请号 WO2008JP71030 申请日期 2008.11.19
申请人 SHARP KABUSHIKI KAISHA;YAMADA, NOBUAKI;FUJII, AKIYOSHI;HAYASHI, HIDEKAZU;TAGUCHI, TOKIO 发明人 YAMADA, NOBUAKI;FUJII, AKIYOSHI;HAYASHI, HIDEKAZU;TAGUCHI, TOKIO
分类号 B29C59/04;B29C33/30;B29C33/38;B29C33/42;B29L11/00;B81C99/00;G02B1/11;H01L21/027 主分类号 B29C59/04
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