发明名称 |
ROLLER TYPE NANO-IMPRINT DEVICE, MOLD ROLL FOR THE ROLLER TYPE NANO-IMPRINT DEVICE, FIXED ROLL FOR THE ROLLER TYPE NANO-IMPRINT DEVICE, AND NANO-IMPRINT SHEET MANUFACTURING METHOD |
摘要 |
Disclosed is a roller type nano-imprint device in which a transferred film, to which a nano-structure has been transferred by a mold roll, can be prevented from becoming uneven in thickness, and the mold roll can be easily exchanged. The roller type nano-imprint device forms protrusions of a nanometer size continuously on the surface of the transferred film by rotating the mold roll. This mold roll is a cylinder having recesses of a nanometer size formed in the outer circumference thereof. The nano-imprint device includes a fluid container having such an elastic film in the region enclosed by the inner circumference of the mold roll as can be inflated by injecting a fluid, so that the mold roll is mounted and demounted, while the elastic film being shrunken, and is held from the inside while the elastic film being inflated. |
申请公布号 |
WO2009107294(A1) |
申请公布日期 |
2009.09.03 |
申请号 |
WO2008JP71030 |
申请日期 |
2008.11.19 |
申请人 |
SHARP KABUSHIKI KAISHA;YAMADA, NOBUAKI;FUJII, AKIYOSHI;HAYASHI, HIDEKAZU;TAGUCHI, TOKIO |
发明人 |
YAMADA, NOBUAKI;FUJII, AKIYOSHI;HAYASHI, HIDEKAZU;TAGUCHI, TOKIO |
分类号 |
B29C59/04;B29C33/30;B29C33/38;B29C33/42;B29L11/00;B81C99/00;G02B1/11;H01L21/027 |
主分类号 |
B29C59/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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