发明名称 |
QUARTZ CRUCIBLE FOR PULLING SILICON SINGLE CRYSTAL AND METHOD FOR MANUFACTURING THE QUARTZ CRUCIBLE |
摘要 |
Provided is a quartz crucible composed of a quartz glass for pulling a silicon single crystal having a double layer structure of an outer layer and an inner layer. In the cross-sectional view of the crucible, the inner layer has a wave-like inner surface shape having protruding sections and recessed sections at least between a start position and an end position of a silicon melt surface in silicon single crystal pulling. When a distance between an upper end of an opening of the crucible and the start position in silicon single crystal puling is 100, only a crucible portion from the upper end of the opening to a position within a range of 40-100 is crystalline. |
申请公布号 |
WO2009107834(A1) |
申请公布日期 |
2009.09.03 |
申请号 |
WO2009JP53886 |
申请日期 |
2009.03.02 |
申请人 |
JAPAN SUPER QUARTZ CORPORATION;SHIMAZU, ATSUSHI;SATO, TADAHIRO |
发明人 |
SHIMAZU, ATSUSHI;SATO, TADAHIRO |
分类号 |
C30B15/10;C03B20/00;C30B29/06 |
主分类号 |
C30B15/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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