发明名称 QUARTZ CRUCIBLE FOR PULLING SILICON SINGLE CRYSTAL AND METHOD FOR MANUFACTURING THE QUARTZ CRUCIBLE
摘要 Provided is a quartz crucible composed of a quartz glass for pulling a silicon single crystal having a double layer structure of an outer layer and an inner layer. In the cross-sectional view of the crucible, the inner layer has a wave-like inner surface shape having protruding sections and recessed sections at least between a start position and an end position of a silicon melt surface in silicon single crystal pulling. When a distance between an upper end of an opening of the crucible and the start position in silicon single crystal puling is 100, only a crucible portion from the upper end of the opening to a position within a range of 40-100 is crystalline.
申请公布号 WO2009107834(A1) 申请公布日期 2009.09.03
申请号 WO2009JP53886 申请日期 2009.03.02
申请人 JAPAN SUPER QUARTZ CORPORATION;SHIMAZU, ATSUSHI;SATO, TADAHIRO 发明人 SHIMAZU, ATSUSHI;SATO, TADAHIRO
分类号 C30B15/10;C03B20/00;C30B29/06 主分类号 C30B15/10
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