| 摘要 |
PROBLEM TO BE SOLVED: To reduce the whole size of a displacement detection device by adequately setting a position of a reflecting element on an optical path, and to provide the displacement detection device that can detect a relative displacement and an absolute angular phase of an object to be detected with high accuracy, and an optical apparatus having the displacement detection device. SOLUTION: This displacement detection device has an illumination means for projecting a light flux to an object to be detected, a first reflection means that is provided to the object to be detected and has reflection sections and non-reflection sections repeatedly formed, a first light reception means for receiving the light flux reflected by the first reflection means, a non-transmissive second reflection means having a reflection section and a non-reflection section, a second light reception means for receiving the light flux reflected by the second reflection means, and a stray light prevention means having a reflection face that reflects the light flux passing through the non-reflection section of the first light reception means to a direction different from a direction of a position where the first light reception means is disposed. The second reflection means is disposed on an optical path of the light flux that is reflected by a part of the stray light prevention means to be directed to a position where the second light reception means is disposed. COPYRIGHT: (C)2009,JPO&INPIT
|
