| 摘要 |
The present invention relates to an ionizer, a static charge eliminating system, an ion balance adjusting method, and a workpiece static charge eliminating method. In an ionizer, when positive and negative voltages are applied to an electrode, an amplitude Vm of the negative voltage is set to be smaller than an amplitude Vp of the positive voltage, and further, the time Tm for which the negative voltage is applied to the electrode is set to be longer than the time Tp for which the positive voltage is applied thereto.
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