| 摘要 |
<p>A device for positioning on optical element (1) in 1, 2 or 3 dimensions comprising elevation and two-dimensional tilting. Said device comprises a positionable plate (2) whereon said optical element (1) is mounted. Said positionable plate (2) comprises a number of electrical conductive coils (6) serving as actuation elements positioned around the geometrical centre of said positionable plate (2). A base plate (3) comprising permanent magnets (5) forming electromotive pairs with said coils (6) is supporting said positionable plate (2) by means of a bearing system (4). When current is driven through said coils (6) over electrical conductive mechanically flexible connections (8), electromotive forces, all substantially normal to said positionable plate (2), are formed at said coil positions. Said forces can be compiled in a two-dimensional tilt torque and an elevation force capable, by means of said bearing system (4), to tilt in two dimensions and/or elevate the positionable plate (2) relative to the base plate (3). Regulators (9), comprising error signals derived from a deviation between instantaneous and desired (10) position of said positionable plate (2) relative to said base plate (3), are used to control said currents.</p> |
