TRANSPARENT CONDUCTIVE FILM AND METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE FILM

摘要

Disclosed is an economically excellent ZnO transparent conductive film having practical moisture resistance and characteristics necessary for transparent conductive films. Also disclosed is a method for producing such a ZnO transparent conductive film. Specifically disclosed is a transparent conductive film (ZnO film) mainly containing ZnO, which comprises a region having a granular crystal structure. The ZnO film is doped with a group III element. The doping amount of the group III element is set at 0.8-11.5% by weight in terms of oxides, and the group III element is composed of at least one element selected from the group consisting of Ga, Al and In. The half width of ZnO(002) rocking curve is set to 10.5°or less. During when the ZnO film is formed on a base, the base is kept still. Formation of the zinc oxide film is carried out while supplying a DC pulse power to a target.