| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel lifting mechanism of an object to be treated capable of reducing the trouble, such as adhesion of deposit due to wraparound of gas between a lifter pin and a pin insertion hole, and a treatment apparatus equipped therewith. SOLUTION: The lifting mechanism of the object to be treated includes a pin insertion hole 50' penetrated to be installed in a vertical direction in a worktable 38 to be placed with the object within a treatment vessel, a lifter pin 72 inserted freely liftably into the pin insertion hole 50', and a driving means for actuating the lifter pin 72 to make the lifter pin 72 appear and disappear from the pin insertion hole 50', and is configured to make the object liftable by the appearance and disappearance operation of the lifter pin 72, in which a surface groove 72X extending over the prescribed range in an axial direction is formed on an outer peripheral surface of the lifter pin 72 or an inner peripheral surface of the pin insertion hole 50'. COPYRIGHT: (C)2009,JPO&INPIT |
