| 摘要 |
PROBLEM TO BE SOLVED: To provide a frequency adjusting method for a piezoelectric vibration device, capable of securing a sufficient adjustment amount even in a compact piezoelectric vibration chip and efficiently adjusting a frequency. SOLUTION: A frequency adjustment step includes: a coarse adjustment step of thinning a large part or the entire area of a metal film 4 for adjustment formed on the main surface side of the arm part 2 of a tuning fork type piezoelectric vibration chip 1 and coarsely adjusting the frequency; and a fine adjustment step of finely adjusting the frequency by further thinning or removing part or the entire area of the area thinned in the coarse adjustment step. COPYRIGHT: (C)2009,JPO&INPIT
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