| 摘要 |
PROBLEM TO BE SOLVED: To provide simple and compact optical equipment by constitution of not replacing a beam splitter in every use wavelength. SOLUTION: This optical equipment of emitting a linear polarization to a sample, to detect a light beam radiated from the sample is arranged with a parallel planar glass plate 5 having substantially no wavelength dependency, in a compounded portion of an illumination optical path of the linear polarization and a detecting optical path of the light beam, makes the linear polarization get incident into the parallel planar glass plate 5 in a form of S-polarization, guides a reflected light thereof to the sample, transmits the light beam from the sample through the parallel planar glass plate 5, and detects it. COPYRIGHT: (C)2009,JPO&INPIT
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