| 摘要 |
PROBLEM TO BE SOLVED: To provide delivery shaft structure of a transfer implement, capable of stabilizing torque for drawing a substrate while maintaining the torque constant from the start of use to the end of the use without requiring a user to intentionally adjust the drawing torque and without enlarging the structure. SOLUTION: The delivery shaft structure of the transfer implement 1 is constructed in such a manner that a spiral spring 4 (elastic member) for energizing a delivery core 2 (delivery shaft) and a delivery gear 3 (delivery drive shaft) in a direction away from each other is interposed in a space S between the delivery core 2 and the delivery gear 3, and a wearing member 5 is disposed in one surface of the space S energized by the spiral spring 4 or the part of spiral spring 4 for energizing the space S. COPYRIGHT: (C)2009,JPO&INPIT
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