| 摘要 |
PROBLEM TO BE SOLVED: To provide a tool for fine work capable of forming a fine groove width and depth of which are 100μm or less, etc. on a surface of a workpiece made of a brittle material such as glass, ceramics, etc. in the fine work of a chip, etc. for a micro reaction system and a fine working method of the brittle material using such the tool for the fine work. SOLUTION: This tool for the fine work forms a cutting blade part 6 a surface of which makes a roughly convex shape on a head end of a tip end part 4 with a hard carbon film 5 by covering the tip end part 4 formed on a tool body 1 with the hard carbon film 5 and increasing film thickness (t) of this hard carbon film 5 larger than an outside diameter (d) on a head end of the tip end part 4. The fine work is applied on the surface of the workpiece made of the brittle material by delivering the tool body 1 while rotating it around a central line O of the tip end part 4 by using such the tool for the fine work. COPYRIGHT: (C)2009,JPO&INPIT
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