发明名称 |
COATING SOLUTION FOR FORMING HIGH DIELECTRIC CONSTANT THIN FILM AND METHOD FOR FORMING DIELECTRIC THIN FILM USING THE SAME |
摘要 |
Disclosed herein are a coating solution for the formation of a dielectric thin film and a method for the formation of a dielectric thin film using the coating solution. The coating solution comprises a titanium alkoxide, a beta-diketone or its derivative, and a benzoic acid derivative having an electron donating group. The method comprises spin coating the coating solution on a substrate to form a thin film and drying the thin film at a low temperature to crystallize the thin film. The titanium-containing coating solution is highly stable. In addition, the coating solution enables formation of a thin film, regardless of the kind of substrates, and can be used to form dielectric thin films in an in-line mode in the production processes of PCBs.
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申请公布号 |
US2009219671(A1) |
申请公布日期 |
2009.09.03 |
申请号 |
US20090437657 |
申请日期 |
2009.05.08 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
BAE JUN HEE;KIM SEUNG HYUN;CHUNG YUL KYO;SONG WON HOON;LIM SUNG TAEK;JIN HYUN JU |
分类号 |
H01G4/10;B05D5/12;H01L29/12 |
主分类号 |
H01G4/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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