| 摘要 |
<p>A conveying robot (10) comprises a body (12), a first arm (18), and a second arm (16). The first arm (18) is so configured as to be capable of reciprocating between a wafer cassette and the upper position of the body (12). The first arm (18) is equipped with a first hand (182) including a plurality of holding parts so constituted as to hold a wafer. The second arm (16) is so configured as to be capable of reciprocating between the upper position of the body (12) and a wafer stage. The second arm (16) is equipped with a second hand (162) including a plurality of holding parts so constituted as to hold the wafer from the angle different from an angle from which the first hand (182) holds the wafer. The holding parts of the first hand (182) and the holding parts of the second hand (162) are positioned at the same height.</p> |
