AIR FLOATATION CONVEYANCE DEVICE AND METHOD OF CONVEYANCE USING AIR

摘要

Rows of air floatation units (1) form a conveying route for planar substrates (10), and the rows are arranged in lines in the direction of conveyance of the planar substrates so as to be in parallel to each other. Each floatation unit (1) is constructed from a rear plate (13) forming a conveying route for planar substrates (10) and from a pair of air supply pipes (11, 12) located on both sides of and in parallel to the conveying route and having inclined nozzles (21) for jetting air to above the center of the rear plate (13). The air floatation unit can be flexibly formed according to the size and weight of planar substrates such as liquid crystal substrates, and the planar substrates can be stably conveyed.