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发明名称
Fotolacke für EUV basierend auf photonischen Kristallen
摘要
申请公布号
DE112007002550(T5)
申请公布日期
2009.09.03
申请号
DE20071102550T
申请日期
2007.10.29
申请人
INTEL CORPORATION
发明人
HANNAH, ERIC
分类号
G03F7/039
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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