发明名称 METHOD FOR MANUFACTURING SUBSTRATE WITH SURFACE STRUCTURE BY EMPLOYING PHOTOTHERMAL EFFECT
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate in which a micro-nano structure can be directly fabricated easily at low cost on a large region of a surface of the substrate by employing photothermal effect. <P>SOLUTION: Nanoparticles are distributed on the surface of the substrate and when a laser beam of a predetermined wavelength is applied to the surface, the nanoparticles on the surface of the substrate are excited by light energy of the laser beam, and the light energy is converted to thermal energy. As a result, the surface structure on the substrate is formed through the thermal energy generated by the excited nanoparticles. Thus, the substrate having a layer of a predetermined pattern is formed. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009200485(A) 申请公布日期 2009.09.03
申请号 JP20090018192 申请日期 2009.01.29
申请人 IND TECHNOL RES INST 发明人 LEE TZONG-MING;UANG RUOH-HUEY;CHIOU KUO-CHAN;WANG YU-MING;CHENG YI-TING
分类号 H05K3/10;H01L21/28;H01L21/288;H05K1/09 主分类号 H05K3/10
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