| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polymer compound showing slight swelling during its development that constitutes a photoresist composition, and a new acrylate derivative useful as a raw material for producing the polymer compound. <P>SOLUTION: Disclosed is an acrylate derivative represented by formula (1). In the formula; R<SP>1</SP>and R<SP>2</SP>each represents a linear, branched or cyclic alkyl group, or R<SP>1</SP>and R<SP>2</SP>together represent a linear, branched or cyclic alkylene group; R<SP>3</SP>and R<SP>4</SP>each represents a hydrogen atom, a hydroxy group, an alkoxy group, or a linear, branched or cyclic alkyl group, or R<SP>3</SP>and R<SP>4</SP>together represent a linear, branched or cyclic alkylene group, an oxygen atom or a sulfur atom; R<SP>5</SP>represents a hydrogen atom, a methyl group, or a trifluoromethyl group; W represents a linear, branched or cyclic alkylene group; and n represents 0 or 1. <P>COPYRIGHT: (C)2009,JPO&INPIT |
