| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus which can make smooth shift from a development stage to a mass-production stage and enables the productivity thereof to be improved. SOLUTION: The substrate processing apparatus 11 is used to manufacture an organic EL device, a liquid crystal device, a semiconductor device, etc., each having a substrate 12 to be processed. The substrate processing apparatus 11 has a first processing chamber 13a to a fifth processing chamber 13e, and a conveyance chamber 14 and, for example, the processing chambers 13a to 13e are arranged linearly along a side surface of the conveyance chamber 14. Each of the processing chambers 13a to 13e can deliver and receive the substrate 12 to and from the conveyance chamber 14 through first gate valves 15. Further, each of the processing chambers 13a to 13e is connected to its adjacent processing chambers 13 through second gate valves 16. COPYRIGHT: (C)2009,JPO&INPIT
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