发明名称 Nitride semiconductor light emitting device and method of frabicating nitride semiconductor laser device
摘要 There is provided a nitride semiconductor light emitting device having a light emitting portion coated with a coating film, the light emitting portion being formed of a nitride semiconductor, the coating film in contact with the light emitting portion being formed of an oxynitride. There is also provided a method of fabricating a nitride semiconductor laser device having a cavity with a facet coated with a coating film, including the steps of: providing cleavage to form the facet of the cavity; and coating the facet of the cavity with a coating film formed of an oxynitride.
申请公布号 US2009218593(A1) 申请公布日期 2009.09.03
申请号 US20090382530 申请日期 2009.03.18
申请人 KAMIKAWA TAKESHI;KAWAGUCHI YOSHINOBU 发明人 KAMIKAWA TAKESHI;KAWAGUCHI YOSHINOBU
分类号 C23C14/06;H01L21/318;H01S5/343 主分类号 C23C14/06
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