| 摘要 |
<p>A deformable mirror system includes a deformable mirror (10), which comprises a deformation part (21) with a reflection surface (23) formed thereon, a electrode substrate (11) fixing the deformation part, and first and second electrodes (22, 14) disposed facing the deformation part and the electrode substrate, respectively, and a deformable mirror drive device (27). The deformable mirror drive device (27) includes an amplifier (28) for generating drive force so as to deform the deformation part, a capacitance detector (29) for detecting capacitance between the first electrode and the second electrode, a compensator (34) for converting a target deformation quantity signal (32) into a target capacitance signal (33) on the basis of a relationship between the capacitance and deformation quantity of the deformation part, and a comparator (42) and an integrator (43) for deciding drive force generated from the amplifier (28) so as to coincide an output from the compensator with an output from the capacitance detector.</p> |
