发明名称 |
THE FOR WIRE BONDINGEQUIPMENT FOR SEMICONDUCTOR PACKAGES |
摘要 |
<p>A gripper of a wire bonding apparatus is provided to reduce an error of the device when gripping a substrate and transferring it by making a lower and upper tong bite the substrate at the same time. In a gripper of a wire bonding apparatus, a gripper(5) is rotated with being link with a driving motor. A rotary shaft(2) comprises a thread of other directions on the top and outer circumference of the lower part, and a lower tong(3) forms a first thread hole corresponding to a screw thread is formed in the lower part of the rotary shaft. A lower tong has a lower gripper(32) which is adhered to closely the bottom of the substrate. An upper tong(4) forms a second thread hole(41) corresponding to a screw thread on the rotary shaft.</p> |
申请公布号 |
KR100914618(B1) |
申请公布日期 |
2009.09.02 |
申请号 |
KR20090000349 |
申请日期 |
2009.01.05 |
申请人 |
KOOKMIN ELECTRONIC CO., LTD. |
发明人 |
KWEON, O KUK |
分类号 |
H01L21/677;H01L21/60;H01L21/683 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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