| 发明名称 |
MEMS SWITCHES WITH DEFORMING MEMBRANES |
| 摘要 |
<p>MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. The MEMS switches may comprise compliant terminals and/or contact conductors to produce contact swiping.</p> |
| 申请公布号 |
EP2095385(A1) |
申请公布日期 |
2009.09.02 |
| 申请号 |
EP20070853433 |
申请日期 |
2007.12.17 |
| 申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC |
发明人 |
LEWIS, ALAN;KOGUT, LIOR;TUNG, MING-HAU |
| 分类号 |
H01H59/00;G02B26/00;G02B26/08 |
主分类号 |
H01H59/00 |
| 代理机构 |
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代理人 |
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