| 摘要 |
A scribing machine and a scribing method thereof are provided to perform an inner-cut scribe or an outer-cut scribe at every scribe line. A scribing machine comprises the following units. A brittle substrate(107) is arranged on a table(106), which is freely moved the y-axis by a motor(105). A scribe head(112) can move the x-axis freely. Every scribe line has a recipe data table presetting which lines require inner-cut scribe or outer-cut scribe. The inner-cut scribe or the outer-cut scribe is performed at every scribe line based on the recipe data table.
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