发明名称 COMPOSITIONS DOPANTES POUR SEMI-CONDUCTEURS (
摘要 The disclosure herein relates to semiconductor doping compositions and to methods for their preparation and use. More particularly, the disclosure relates to liquid silica-based doping compositions which may be applied to a surface of a semiconductor substrate and, upon heating, an impurity is diffused from a film of the doping composition into the substrate to form a region therein having the desired electrical properties.
申请公布号 BE771466(A1) 申请公布日期 1972.02.18
申请号 BE19710771466 申请日期 1971.08.18
申请人 MONSANTO CY, 800 NORTH LINDBERGH BOULEVARD ST. LOUIS, MISSOURI63166 (E.U.A.), 发明人 J.G. SCHMIDT;J.G. SCHMIDT.
分类号 H01L21/22;H01L21/225;H01L21/316;(IPC1-7):01J/ 主分类号 H01L21/22
代理机构 代理人
主权项
地址