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发明名称
METHOD AND SYSTEM FOR LOGIC DESIGN FOR CELL PROJECTION PARTICLE BEAM LITHOGRAPHY
摘要
申请公布号
EP2095279(A1)
申请公布日期
2009.09.02
申请号
EP20070871641
申请日期
2007.11.29
申请人
D2S, INC.
发明人
FUJIMURA, AKIRA;MITSUHASHI, TAKASHI;YOSHIDA, KENJI
分类号
G06F17/50
主分类号
G06F17/50
代理机构
代理人
主权项
地址
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