FERROELECTRIC RECORDING MEDIA AND MANUFACTURING METHOD THEREOF

摘要

A ferroelectric recording media and a manufacturing method thereof for performing data storage of high density are provided to rise from the surface of the ferroelectric layer due to smooth surface of the ferroelectric layer. A manufacturing method of a ferroelectric recording media is as follows. An electrode layer(20) which is the layer of conductive material is formed on a substrate(10). An intermediate layer(30) which is the dielectric material layer on the electrode layer is formed. The source material layer is formed on the intermediate layer. A ferroelectric layer(50) is formed through the annealing process from the source material layer. The capping layer preventing the loss of the source material layer by the volatilization at the reaction process is formed on the source material layer. The source material layer is the same material layer as the ferroelectric layer. The source material layer comprises a plurality of material layers forming the ferroelectric layer with the mutual reversal.