| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus and a laser beam machining method which form a plurality of holes different in the width and depth to be machined on a substrate in the lump by controlling the energy density of a laser beam with which machining points are each irradiated. <P>SOLUTION: The laser beam machining apparatus machines a plurality of portions to be machined in the lump within the region to be machined of a workpiece W, and the laser beam machining apparatus includes: a laser device; a converging means of a laser beam emitted from the laser device; and an arranging means of the workpiece. The converging means is composed of the aggregate of different micro-lenses which correspond to a portion to be machined different at least in either of the depth to be machined and the width to be machined of the portion to be machined, and in the micro-lenses, stepped parts provided with the stair-wise steps in the thickness direction are formed symmetrically on a concentric circle and the number of the steps in the stepped parts or the height of the stepped parts is formed according to the width to be machined and the depth to be machined of the portion to be machined. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
