| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer reducing noise generated by an imaging surface and enhancing measurement precision of interference fringes. SOLUTION: The interferometer 1 is equipped with: a light source 2 emitting light flux L1 on a first optical axis C1; a reference plane 7a arranged on the first optical axis; a beam splitter 4 reflecting interference light L4 forcing an optical flux L2 reflected by the reference plane to interfere with a optical flux L3 reflected by a test face W1 arranged on the first optical axis or an optical flux reflected by after transmitting through a test object W arranged on the first optical axis to transmit through again the test object on a second optical axis C2 intersecting the first optical axis; and an imaging means, while being arranged on the second optical axis to image interference light, including an imaging surface 14 arranged to tilt the own normal to the second optical axis. COPYRIGHT: (C)2011,JPO&INPIT |
