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发明名称
IMPROVED NANOIMPRINT METHOD
摘要
申请公布号
KR20110061585(A)
申请公布日期
2011.06.09
申请号
KR20117006979
申请日期
2009.08.26
申请人
AMO GMBH
发明人
KOO NAMIL;KIM JUNG WUK;MOORMANN CHRISTIAN
分类号
B29C59/02;B29C33/38;B29C35/08
主分类号
B29C59/02
代理机构
代理人
主权项
地址
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