| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide type sensor chip which can improve measurement accuracy by removing a substrate propagating component. SOLUTION: The optical waveguide type sensor chip includes a substrate 11, an optical waveguide layer 13 formed in a first principal surface 11a of the substrate 11 and having a refractive index higher than that of the substrate 11, a pair of gratings 12 for making light incident into and emitted from the optical guide waveguide layer 13, a sensing film 15 formed on the optical waveguide layer 13 and provided across the pair of gratings 12 for changing the strength of light propagating through the optical guide layer 13 according to the amount or concentration of an introduced object to be measured, and a substrate propagating component removal part 20 formed in a second principal surface 11b of the substrate 11 and arranged at a position opposed to a sensing film 15 for removing a substrate propagating component Q reflected and specularly diffracted by the gratings 12 and propagating through the substrate 11. COPYRIGHT: (C)2011,JPO&INPIT |
