发明名称 THIN FILM TRANSISTOR SUBSTRATE AND THE METHOD THEREOF
摘要 A thin film transistor array panel includes a gate line, a gate insulating layer that covers the gate line, a semiconductor layer that is disposed on the gate insulating layer, a data line and drain electrode that are disposed on the semiconductor layer, a passivation layer that covers the data line and drain electrode and has a contact hole that exposes a portion of the drain electrode, and a pixel electrode that is electrically connected to the drain electrode through the contact hole. The data line and drain electrode each have a double layer that includes a lower layer of titanium and an upper layer of copper, and the lower layer is wider than the upper layer, and the lower layer has a region that is exposed. The gate insulating layer may have a step shape.
申请公布号 US2011133193(A1) 申请公布日期 2011.06.09
申请号 US20100844356 申请日期 2010.07.27
申请人 发明人 SONG JEAN-HO;CHOI SHIN-IL;HONG SUN-YOUNG;KIM SHI-YUL;LEE KI-YEUP;YOUN JAE-HYOUNG;KIM SUNG-RYUL;SEO O-SUNG;BAE YANG-HO;CHOUNG JONG-HYUN;YANG DONG-JU;KIM BONG-KYUN;OH HWA-YEUL;HONG PIL-SOON;KIM BYEONG-BEOM;PARK JE-HYEONG;JEONG YU-GWANG;KIM JONG-IN;SUH NAM-SEOK
分类号 H01L27/12;H01L21/336;H01L29/786 主分类号 H01L27/12
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