发明名称 |
ELECTROMECHANICAL SYSTEM HAVING A DIELECTRIC MOVABLE MEMBRANE |
摘要 |
An electromechanical device includes a partially reflective and partially transmissive layer and a movable functional element. The movable functional element includes a patterned flexible dielectric layer and a reflective layer mechanically coupled to the flexible dielectric layer. The patterned flexible dielectric layer is configured to flex in response to voltages applied to the partially reflective and partially transmissive layer to move the functional element in a direction generally perpendicular to the partially reflective and partially transmissive layer. The reflective layer is situated between the flexible dielectric layer and the partially reflective and partially transmissive layer.
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申请公布号 |
US2011134505(A1) |
申请公布日期 |
2011.06.09 |
申请号 |
US201113025859 |
申请日期 |
2011.02.11 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
SASAGAWA TERUO |
分类号 |
G02B26/00 |
主分类号 |
G02B26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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