METHOD FOR CONTROLLING FILTERING SYSTEM OF CHEMICAL GAS

摘要

PURPOSE: A method for controlling a chemical gas filtering system is provided to improve the cleaning efficiency of a sintered metal filter in a cleaning process with respect to the sintered metal filter. CONSTITUTION: A filter(30) filters and purifies fine dust from chemical gas. Cleaning gas for a back pulsing operation is periodically supplied into a filtering part(34) which is located in the filter. The supply of the cleaning gas is controlled. In the back pulsing operation, the cleaning gas is supplied to the opposite direction of the supply direction of the chemical gas. The cleaning gas is nitrogen or purified chemical gas.